✦ LIBER ✦
Using surface wave produced plasmas to determine the frequency effect upon etching of polyimide in RF and microwave sustained plasmas
✍ Scribed by G. Sauvé; M. Moisan; J. Paraszczak; Y. Arnal; J. Heindenreich; A. Ricard
- Book ID
- 107920394
- Publisher
- Elsevier Science
- Year
- 1989
- Tongue
- English
- Weight
- 372 KB
- Volume
- 9
- Category
- Article
- ISSN
- 0167-9317
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