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Using porous silicon as semi-insulating substrate for β-SiC high temperature optical-sensing devices

✍ Scribed by Hsieh, W.T.; Fang, Y.K.; Wu, K.H.; Lee, W.J.; Ho, J.J.; Ho, C.W.


Book ID
114538637
Publisher
IEEE
Year
2001
Tongue
English
Weight
70 KB
Volume
48
Category
Article
ISSN
0018-9383

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