✦ LIBER ✦
Using phosphoric acid-impregnated activated carbon to improve the efficiency of chemical filters for the removal of airborne molecular contaminants (AMCs) in the make-up air unit (MAU) of a cleanroom
✍ Scribed by Y.-H. Kang; A. Shiue; S.-C. Hu; C.-Y. Huang; H.-T. Chen
- Book ID
- 108075528
- Publisher
- Elsevier Science
- Year
- 2010
- Tongue
- English
- Weight
- 594 KB
- Volume
- 45
- Category
- Article
- ISSN
- 0360-1323
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