Using methods of hydrogen permeability, gas generation, and auger electron spectroscopy for certifying constructional materials for “clean rooms”

✍ Scribed by V. P. Shestakov; I. L. Tazhibaeva; O. G. Romanenko; A. K. Klepikov; A. D. Ivanov; V. P. Ushakov; V. A. Safonov; V. P. Smetannikov; V. I. Perekhozhev

• Book ID: 104809290
• Publisher: Springer
• Year: 1993
• Tongue: English
• Weight: 330 KB
• Volume: 29
• Category: Article
• ISSN: 1573-885X
• DOI: 10.1007/bf00558671