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Using liquid chemical etching to manufacture technological structures of minimum size

✍ Scribed by I. V. Medvedev; N. I. Khodakovskii; V. A. Sherstyuk; G. A. Chechko; V. N. Sklepovoi

Book ID: 105138071
Publisher: Springer US
Year: 1994
Tongue: English
Weight: 251 KB
Volume: 72
Category: Article
ISSN: 1573-8795
DOI: 10.1007/bf01259480

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