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Using ion beam analysis in determining the mechanisms of cleavage in hydrogen ion implanted Si

✍ Scribed by Michael Nastasi; Tobias Höchbauer; Raymond D. Verda; Amit Misra; Jung-Kun Lee; James W. Mayer; S.S. Lau


Book ID
113822955
Publisher
Elsevier Science
Year
2004
Tongue
English
Weight
330 KB
Volume
219-220
Category
Article
ISSN
0168-583X

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