✦ LIBER ✦
Using genetic algorithm to optimize the dummy filling problem of the flash lamp anneal process in semiconductor manufacturing
✍ Scribed by S. C. Lin, S. F. Liu, F. L. Chen
- Book ID
- 113069729
- Publisher
- Springer US
- Year
- 2010
- Tongue
- English
- Weight
- 1009 KB
- Volume
- 23
- Category
- Article
- ISSN
- 0956-5515
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