Using capacitive sensors for in situ calibration of displacements in a piezo-driven translation stage of an STM

✍ Scribed by A.E. Holman; W.Chr. Heerens; F. Tuinstra

• Publisher: Elsevier Science
• Year: 1993
• Tongue: English
• Weight: 875 KB
• Volume: 36
• Category: Article
• ISSN: 0924-4247
• DOI: 10.1016/0924-4247(93)80138-7

✦ Synopsis

The uncertainty m the exact lateral posltlon of the moving part relative to the frame 1s one of the techmcal problems m plezo-driven translation stages for submrcron translations This IS mainly caused by non-lmeantles m the plezo actuators and thermal dnft m the construction The plezo voltages are therefore not appropnate as the reference for the absolute displacement In ths paper we show some non-ideal properties of a one-dunenslonal plezo-dnven translation stage, which could be used m a scanning tunnellmg rmcroscope (STM), for lnstancc To ehrmnate the posltlon uncertamty of the displacement, we have installed an independent calibration system wbch measures the displacement

We use a capacitive sensor system Hnth a resolution m the picometre range Usmg the sensor mformation, we are able to calibrate the stage displacements beforehand or correct the actual plezo voltages 111 a feedback loop durmg displacement We obtain an absolute calibrated posltlon determmatlon and hysteresis-free linear displacements