✦ LIBER ✦
Use of semiconducting thin film heater for the substrate heating during vacuum evaporation and sputtering: A Baygozhin et al,Zavodsk Lab, 33 (8), 1967, 1034–1035 (in Russian)
- Publisher
- Elsevier Science
- Year
- 1967
- Tongue
- English
- Weight
- 182 KB
- Volume
- 17
- Category
- Article
- ISSN
- 0042-207X
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