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Use of ion-induced X-rays to locate ion-implanted impurities in gallium arsenide

✍ Scribed by M. Takai; K. Gamo; H. Yagita; K. Masuda; S. Namba; A. Mizobuchi


Publisher
Elsevier Science
Year
1978
Weight
254 KB
Volume
149
Category
Article
ISSN
0029-554X

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