✦ LIBER ✦
Use of in situ ellipsometry to observe phase transitions during boron nitride thin film deposition
✍ Scribed by W.D. McFall; D.R. McKenzie; R.P. Netterfield
- Publisher
- Elsevier Science
- Year
- 1996
- Tongue
- English
- Weight
- 566 KB
- Volume
- 81
- Category
- Article
- ISSN
- 0257-8972
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