✦ LIBER ✦
Use of an ion energy analyser-mass spectrometer to measure ion kinetic-energy distributions from RF discharges in argon-helium gas mixtures
✍ Scribed by Olthoff, J.K.; Van Brunt, R.J.; Radovanov, S.B.; Rees, J.A.
- Book ID
- 114456768
- Publisher
- The Institution of Electrical Engineers
- Year
- 1994
- Tongue
- English
- Weight
- 499 KB
- Volume
- 141
- Category
- Article
- ISSN
- 1350-2344
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