✦ LIBER ✦
Use of an externally applied axial magnetic field to control ion/neutral flux ratios incident at the substrate during magnetron sputter deposition
✍ Scribed by Petrov, I.
- Book ID
- 121790198
- Publisher
- AVS (American Vacuum Society)
- Year
- 1992
- Tongue
- English
- Weight
- 603 KB
- Volume
- 10
- Category
- Article
- ISSN
- 0734-2101
- DOI
- 10.1116/1.577812
No coin nor oath required. For personal study only.