✦ LIBER ✦
Use of an electron cyclotron resonance plasma source for Si(001)2 × 1 surface nitridation by N2: an X-ray photoemission study
✍ Scribed by D. Bolmont; J.L. Bischoff; F. Lutz; L. Kubler
- Book ID
- 118365732
- Publisher
- Elsevier Science
- Year
- 1992
- Tongue
- English
- Weight
- 373 KB
- Volume
- 269-270
- Category
- Article
- ISSN
- 0039-6028
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