Use of a synchrotron X-ray microbeam to map composition and structure of multimetallic metal oxide films deposited by combinatorial chemical vapor deposition
✍ Scribed by Bin Xia; Yong S. Chu; Wayne L. Gladfelter
- Book ID
- 104094027
- Publisher
- Elsevier Science
- Year
- 2007
- Tongue
- English
- Weight
- 482 KB
- Volume
- 201
- Category
- Article
- ISSN
- 0257-8972
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✦ Synopsis
Using anhydrous metal nitrates as single source precursors, combinatorial chemical vapor deposition was used to create compositional gradients in the bimetallic ZrO 2 /HfO 2 system and the trimetallic ZrO 2 /HfO 2 /SnO 2 system. Composition and structural information were probed simultaneously by measuring the fluorescence and diffraction resulting from exposure of the film to a 30 μm diameter X-ray beam at the Advanced Photon Source. The higher resolution made possible by the small beam size provided an accurate map of composition and structure. In the homologous zirconia-hafnia series a decrease in lattice constants and a change in film texture was observed as a function of increased Hf concentration. As reported elsewhere, at intermediate compositions, gradients involving ZrO 2 and SnO 2 or HfO 2 and SnO 2 give rise to a crystalline phase(α-PbO 2 structure type) that differs from that found for either of the end members. The simultaneous measurement of fluorescence and diffraction coupled with the small spot X-ray source provides a more accurate correlation between composition and structure.
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