✦ LIBER ✦

USAF selects V90 MBE system

Book ID: 104367965
Publisher: Elsevier Science
Year: 2005
Tongue: English
Weight: 58 KB
Volume: 18
Category: Article
ISSN: 0961-1290
DOI: 10.1016/s0961-1290(05)71291-6

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✦ Synopsis

Technologies and Devices

International Inc (TDI) now offers 3-inch diameter semiinsulating materials for nitridebased semiconductor devices.

Wafers consist of 10-18 µmthick single crystal AlN film deposited on a conductive SiC substrate.The product targets substrate applications for ultra high power AlGaN/GaN HEMTs. Other applications include highpower blue and UV light emitters, LEDs and LDs.

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