Untersuchung des Plasmas für das reaktive Niedervolt-Ionenplattieren. Study of the plasma of the reactive low voltage ion plating process

✍ Scribed by G. N. Strauss; H. K. Pulker

• Publisher: John Wiley and Sons
• Year: 2000
• Tongue: English
• Weight: 133 KB
• Volume: 12
• Category: Article
• ISSN: 0947-076X
• DOI: 10.1002/1522-2454(200002)12:1<25::aid-vipr25>3.0.co;2-v