Universal Block Copolymer Lithography for Metals, Semiconductors, Ceramics, and Polymers

✍ Scribed by Seong-Jun Jeong; Guodong Xia; Bong Hoon Kim; Dong Ok Shin; Se-Hun Kwon; Sang-Won Kang; Sang Ouk Kim

• Publisher: John Wiley and Sons
• Year: 2008
• Tongue: English
• Weight: 377 KB
• Volume: 20
• Category: Article
• ISSN: 0935-9648
• DOI: 10.1002/adma.200702930