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Uniformity of deposited film thickness on a uneven surface by direct simulation Monte Carlo

โœ Scribed by Lung-Chang Hong; Chi-Chung Hsu; Dah-Shyang Tsai

Book ID
114194194
Publisher
Elsevier Science
Year
1997
Tongue
English
Weight
817 KB
Volume
48
Category
Article
ISSN
0254-0584

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Monte Carlo simulation of thin-film grow
Monte Carlo simulation of thin-film growth on a surface with a triangular lattice
โœ Wei Helin; Liu Zuli; Yao Kailun ๐Ÿ“‚ Article ๐Ÿ“… 1999 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 159 KB

The thin-film growth process on a triangular lattice surface is studied by a Monte Carlo simulation (MCS). Four kinetic processes are considered: atom deposition, adatom diffusion, adatom nucleation and adatom reevaporation. We pay close attention to the substrate temperature and the interaction bet