Unexpected short- and medium-range atomic structure of sputtered amorphous silicon upon thermal annealing

✍ Scribed by Haberl, B.; Bogle, S. N.; Li, T.; McKerracher, I.; Ruffell, S.; Munroe, P.; Williams, J. S.; Abelson, J. R.; Bradby, J. E.

• Book ID: 121302996
• Publisher: American Institute of Physics
• Year: 2011
• Tongue: English
• Weight: 786 KB
• Volume: 110
• Category: Article
• ISSN: 0021-8979
• DOI: 10.1063/1.3658628