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Understanding the internal friction of a silicon micro-mechanical oscillator

โœ Scribed by Xiao Liu; H. Haucke; J.F. Vignola; H.J. Simpson; J.W. Baldwin; B.H. Houston; D.M. Photiadis


Book ID
108214674
Publisher
Elsevier Science
Year
2009
Tongue
English
Weight
535 KB
Volume
521-522
Category
Article
ISSN
0921-5093

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