✦ LIBER ✦
Understanding deposition rate loss in high power impulse magnetron sputtering: I. Ionization-driven electric fields
✍ Scribed by Brenning, N; Huo, C; Lundin, D; Raadu, M A; Vitelaru, C; Stancu, G D; Minea, T; Helmersson, U
- Book ID
- 120571006
- Publisher
- Institute of Physics
- Year
- 2012
- Tongue
- English
- Weight
- 828 KB
- Volume
- 21
- Category
- Article
- ISSN
- 0963-0252
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