Ultraviolet/ozone cleaning of a soft x-ray grating contaminated by synchrotron radiation

✍ Scribed by Harada, Tatsuo ;Yamaguchi, Sumio ;Itou, Masaaki ;Mitani, Shichirou ;Maezawa, Hideki ;Mikuni, Akira ;Okamoto, Wataru ;Yamaoka, Hitoshi

• Book ID: 115341399
• Publisher: The Optical Society
• Year: 1991
• Tongue: English
• Weight: 643 KB
• Volume: 30
• Category: Article
• ISSN: 1559-128X
• DOI: 10.1364/AO.30.001165