✦ LIBER ✦
Ultraviolet photoelectron spectroscopic study of the surface etching of air-oxidized hydrogenated amorphous silicon by aqueous hydrofluoric acid solution
✍ Scribed by T. Bekkay; E. Sacher; A. Yelon
- Publisher
- Elsevier Science
- Year
- 1992
- Tongue
- English
- Weight
- 364 KB
- Volume
- 59
- Category
- Article
- ISSN
- 0169-4332
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