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Ultraviolet-Ozone Oxidation of Metal Films

✍ Scribed by Ramanathan, Shriram; Chi, David; McIntyre, Paul C.; Wetteland, Christopher J.; Tesmer, Joseph R.

Book ID: 126318386
Publisher: The Electrochemical Society
Year: 2003
Tongue: English
Weight: 389 KB
Volume: 150
Category: Article
ISSN: 0013-4651
DOI: 10.1149/1.1566416

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