Ultraviolet laser-assisted surface treatment of InP with phosphine gas

✍ Scribed by Takashi Sugino; Hiroyuki Itoh; Aniroot Boonyasirikool; Junji Shirafuji

• Book ID: 112822242
• Publisher: Springer US
• Year: 1992
• Tongue: English
• Weight: 697 KB
• Volume: 21
• Category: Article
• ISSN: 0361-5235
• DOI: 10.1007/bf02670927