✦ LIBER ✦
Ultraviolet assisted injection liquid source chemical vapour deposition (UVILS-CVD) of tantalum pentoxide
✍ Scribed by P. V Kelly; M. B Mooney; J. T Beechinor; B. J O'Sullivan; P. K Hurley; G. M Crean; J.-Y Zhang; I. W Boyd; M Paillous; C Jimenez; J.-P Senateur
- Publisher
- John Wiley and Sons
- Year
- 2000
- Tongue
- English
- Weight
- 147 KB
- Volume
- 10
- Category
- Article
- ISSN
- 1616-301X
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