Ultrathin TiN Membranes as a Technology Platform for CMOS-Integrated MEMS and BioMEMS Devices

✍ Scribed by M. Birkholz; K.-E. Ehwald; P. Kulse; J. Drews; M. Fröhlich; U. Haak; M. Kaynak; E. Matthus; K. Schulz; D. Wolansky

• Publisher: John Wiley and Sons
• Year: 2011
• Tongue: English
• Weight: 653 KB
• Volume: 21
• Category: Article
• ISSN: 1616-301X
• DOI: 10.1002/adfm.201002062