Study of porosity and stiffness measurem
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C.M. Flannery
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Article
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2002
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Elsevier Science
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English
โ 151 KB
Nanoporous aerogel films are of great scientific and commercial interest because of their outstanding potential for application to microelectronic interconnect, associated with low dielectric constant. Of the parameters which describe such aerogel films, density/porosity and stiffness are two of the