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Ultrasensitive TES Bolometers for Space-Based FIR Astronomy

โœ Scribed by Morozov, D.; Mauskopf, P. D.; Ade, P.; Ridder, M.; Khosropanah, P.; Bruijn, M.; van der Kuur, J.; Hoevers, H.; Gao, J.-R.; Griffin, D.

Book ID
118177236
Publisher
IEEE
Year
2011
Tongue
English
Weight
295 KB
Volume
21
Category
Article
ISSN
1051-8223

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We report a fabrication process for deep etching silicon to different depths with a single masking layer, using standard masking and exposure techniques. Using this technique, we have incorporated a deep notch in the support walls of a transition-edge-sensor (TES) bolometer array during the detector