✦ LIBER ✦
Ultrasensitive non-chemically amplified low-contrast negative electron beam lithography resist with dual-tone behaviour
✍ Scribed by Canalejas-Tejero, Víctor; Carrasco, Sergio; Navarro-Villoslada, Fernando; García Fierro, José Luis; Capel-Sánchez, María del Carmen; Moreno-Bondi, María Cruz; Barrios, Carlos Angulo
- Book ID
- 120259528
- Publisher
- The Royal Society of Chemistry
- Year
- 2013
- Tongue
- English
- Weight
- 507 KB
- Volume
- 1
- Category
- Article
- ISSN
- 2050-7526
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