Ultrasensitive mass sensor fully integrated with complementary metal-oxide-semiconductor circuitry

✍ Scribed by Forsen, E.; Abadal, G.; Ghatnekar-Nilsson, S.; Teva, J.; Verd, J.; Sandberg, R.; Svendsen, W.; Perez-Murano, F.; Esteve, J.; Figueras, E.; Campabadal, F.; Montelius, L.; Barniol, N.; Boisen, A.

• Book ID: 120276599
• Publisher: American Institute of Physics
• Year: 2005
• Tongue: English
• Weight: 458 KB
• Volume: 87
• Category: Article
• ISSN: 0003-6951
• DOI: 10.1063/1.1999838