Ultranarrow Silicon Inverse Taper Waveguide Fabricated with Double-Patterning Photolithography for Low-Loss Spot-Size Converter

✍ Scribed by Takei, Ryohei; Omoda, Emiko; Suzuki, Masao; Manako, Shoko; Kamei, Toshihiro; Mori, Masahiko; Sakakibara, Youichi

• Book ID: 124071965
• Publisher: Institute of Pure and Applied Physics
• Year: 2012
• Tongue: English
• Weight: 698 KB
• Volume: 5
• Category: Article
• ISSN: 1882-0778
• DOI: 10.1143/APEX.5.052202