Ultralow-k Dielectrics Made by Supercritical Foaming of Thin Polymer Films

✍ Scribed by B. Krause; G.-H. Koops; N.F.A. van der Vegt; M. Wessling; M. Wübbenhorst; J. van Turnhout

• Publisher: John Wiley and Sons
• Year: 2002
• Tongue: English
• Weight: 200 KB
• Volume: 14
• Category: Article
• ISSN: 0935-9648
• DOI: 10.1002/1521-4095(20020805)14:15<1041::aid-adma1041>3.0.co;2-a