Ultrahigh vacuum system for metering gas flow (leaks) and computing flow rate (U)

• Publisher: Elsevier Science
• Year: 1976
• Tongue: English
• Weight: 146 KB
• Volume: 26
• Category: Article
• ISSN: 0042-207X
• DOI: 10.1016/s0042-207x(76)80681-1

✦ Synopsis

Classified abstracts 1472-l 483 23. PLUMBING, VACUUM VALVES, BAFFLES AND TRAPS 23 1472. A vacuum lock for introducing solid samples into a vacuum vessel under uhv-conditions. (Germany) A robust simple three-stage vacuum lock is described. This lock allows to introduce solid samples of 20 x 10 x IO mm size into a vacuum vessel that has been pumped down to IO-lo mbar. After introducing the sample a pressure of 10-s mbar is achieved within 1 min and a pressure of a few IO-'IX mbar within I h without baking. The vacuum lock is compatible with the usual sample treating facilities, e.g. warming-up, cooling, glow discharge cleaning, ionic etching etc.