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Ultrahigh vacuum evaporators for the production of active semiconductor elements using ion-pumped systems

Publisher: Elsevier Science
Year: 1967
Tongue: English
Weight: 148 KB
Volume: 17
Category: Article
ISSN: 0042-207X
DOI: 10.1016/0042-207x(67)90262-x

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📂 Article 📅 1966 🏛 Elsevier Science 🌐 English ⚖ 147 KB