Ultrafine and High Aspect Ratio Metal Lines by Electron Beam Lithography for Silicon Solar Cell Metallisation

✍ Scribed by Baochen Liao; Armin G. Aberle; Thomas Mueller; Lalit K. Verma; Aaron J. Danner; Hyunsoo Yang; Charanjit S. Bhatia

• Book ID: 116426544
• Publisher: Elsevier
• Year: 2012
• Weight: 536 KB
• Volume: 15
• Category: Article
• ISSN: 1876-6102
• DOI: 10.1016/j.egypro.2012.02.011