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Ultrafast progressive breakdown associated with metal-like filament formation of a breakdown path in a HfO[sub 2]∕TaN∕TiN transistor
✍ Scribed by R. Ranjan; K. L. Pey; C. H. Tung; D. S. Ang; L. J. Tang; T. Kauerauf; R. Degraeve; G. Groeseneken; S. De Gendt; L. K. Bera
- Book ID
- 125846784
- Publisher
- American Institute of Physics
- Year
- 2006
- Tongue
- English
- Weight
- 769 KB
- Volume
- 88
- Category
- Article
- ISSN
- 0003-6951
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