Ultrafast high-resolution contact lithography with excimer lasers : K. Jain, C. G. Willson and B. J. Lin. IBM Jl Res. Dev.26 (2), 151 (1982)

• Book ID: 107829697
• Publisher: Elsevier Science
• Year: 1983
• Tongue: English
• Weight: 137 KB
• Volume: 23
• Category: Article
• ISSN: 0026-2714
• DOI: 10.1016/0026-2714(83)91493-2