✦ LIBER ✦
Ultra-smooth platinum surfaces for nanoscale devices fabricated using chemical mechanical polishing
✍ Scribed by M. Saif Islam; G.Y. Jung; T. Ha; D.R. Stewart; Y. Chen; S.Y. Wang; R. Stanley Williams
- Publisher
- Springer
- Year
- 2005
- Tongue
- English
- Weight
- 222 KB
- Volume
- 80
- Category
- Article
- ISSN
- 1432-0630
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