Ultra precision positioning system for servo motor–piezo actuator using the dual servo loop and digital filter implementation

✍ Scribed by Heui Jae Pahk; Dong Sung Lee; Jong Ho Park

• Publisher: Elsevier Science
• Year: 2001
• Tongue: English
• Weight: 265 KB
• Volume: 41
• Category: Article
• ISSN: 0890-6955
• DOI: 10.1016/s0890-6955(00)00061-4