✦ LIBER ✦
Ultra-high vacuum measurements of the internal stress of PVD titanium films as a function of thickness and its dependence on substrate temperature
✍ Scribed by HJ Schneeweiβ; R Abermann
- Publisher
- Elsevier Science
- Year
- 1992
- Tongue
- English
- Weight
- 338 KB
- Volume
- 43
- Category
- Article
- ISSN
- 0042-207X
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