✦ LIBER ✦
Ultra-high depth resolution RBS and SIMS of the modification of a Ge delta in Si during 2 keV O2+ sputtering
✍ Scribed by W.M. Arnoldbik; Z.X. Jiang; P.F.A. Alkemade; D.O. Boerma
- Book ID
- 114169670
- Publisher
- Elsevier Science
- Year
- 1998
- Tongue
- English
- Weight
- 430 KB
- Volume
- 136-138
- Category
- Article
- ISSN
- 0168-583X
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