✦ LIBER ✦
Ultra-flat InP substrates produced using a chemo-mechanical polishing technique
✍ Scribed by C.G. Tuppen; B.H. Conen
- Publisher
- Elsevier Science
- Year
- 1987
- Tongue
- English
- Weight
- 295 KB
- Volume
- 80
- Category
- Article
- ISSN
- 0022-0248
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