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Ultra Clean Processing of Semiconductor Surfaces XI

✍ Scribed by Mertens, Paul; Meuris, Marc; Heyns, Marc

Publisher
Trans Tech Publications Ltd
Year
2013
Leaves
328
Category
Library
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✦ Synopsis

This extensively revised comprehensive textbook, covering a wide range of topics in systems engineering, is suitable for courses at the graduate and undergraduate levels, each with a different emphasis. There is more than enough material to cover two semesters of an undergraduate course, as well as a one semester graduate course. The pedagogy provides enough flexibility for an instructor to teach the topics in systems engineering she or he would like. This book is sufficiently broad-based for undergraduate and graduate programs in various branches of engineering and management.

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