✦ LIBER ✦
U-shaped bimorph micro-electromechanical cantilevers with combined thermal/electrostatic actuation
✍ Scribed by Panaitov, Gregory; Klein, Norbert; Trellenkamp, Stefan
- Book ID
- 123133926
- Publisher
- Elsevier Science
- Year
- 2013
- Tongue
- English
- Weight
- 805 KB
- Volume
- 112
- Category
- Article
- ISSN
- 0167-9317
No coin nor oath required. For personal study only.