✦ LIBER ✦
Twyman-Green interferometry for measurement of stresses in thin film on optically flat silicon substrates : C. M. Drum, Rev. Scient. Instrum. 40 (6), (1969), p. 833
- Book ID
- 103273201
- Publisher
- Elsevier Science
- Year
- 1970
- Tongue
- English
- Weight
- 200 KB
- Volume
- 9
- Category
- Article
- ISSN
- 0026-2714
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