Two-wavelength full-field heterodyne interferometric profilometry

✍ Scribed by Hsieh, Hung-Chih; Chen, Yen-Liang; Jian, Zhi-Chen; Wu, Wang-Tsung; Su, Der-Chin

• Book ID: 120575932
• Publisher: Institute of Physics
• Year: 2009
• Tongue: English
• Weight: 660 KB
• Volume: 20
• Category: Article
• ISSN: 0957-0233
• DOI: 10.1088/0957-0233/20/2/025307