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Two-Stage Atomic Layer Deposition of Aluminum Oxide on Alkanethiolate Self-Assembled Monolayers Using n -Propanol and Water as Oxygen Sources

✍ Scribed by Kobayashi, Nobuhiko P.; Williams, R. Stanley


Book ID
126111693
Publisher
American Chemical Society
Year
2008
Tongue
English
Weight
272 KB
Volume
20
Category
Article
ISSN
0897-4756

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