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Two photon absorption coefficients and processing parameters for photoresists

✍ Scribed by Zahidur R. Chowdhury; Robert Fedosejevs

Book ID: 106185292
Publisher: Springer-Verlag
Year: 2007
Tongue: English
Weight: 326 KB
Volume: 14
Category: Article
ISSN: 0946-7076
DOI: 10.1007/s00542-007-0394-1

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